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Patent
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Petitioner / Claimant (Plaintiff)
Entegris, Inc.
Respondent / Defendant
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Dispute Summary
Entegris has filed a PGR petition challenging U.S. Patent 12,347,711, which covers a wafer‑container gas diffusion device. The company alleges anticipation, obviousness, and indefiniteness over its own prior‑art references and seeks cancellation of all 31 claims.
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